CDO Local scrubber:某晶圓廠區域洗滌設備異常事件之風險評估與改善對策
某晶圓廠區域洗滌設備異常事件之風險評估與改善對策
標竿案例
https://top.energypark.org.tw
節省電力:[(5.146kW×24×360×20=889,229)-(1.294kW×24×360×20=223,603)]=665,626度/年=665.63千度/年。
公司介紹
http://www.osc-tw.com
本公司代理K.J.L Group 真空元件、真空系統高效率冰水機、及半導體廠用CDO 加熱水洗式廢氣處理機。 1989年東服企業有限公司(Orient Service Co.; Ltd),並獲得美商康 ...
半導體業區域排氣控制器的安全評估
https://ndltd.ncl.edu.tw
fine assessment in these equipment especially in the local scrubber. The aim of this thesis is trying to do this. This research has made a whole analysis in ...
竹科半導體廠廠務端local scrubber的疑問???
https://www.mobile01.com
2.半導體廠務Local Scrubber相關設備之維護、保養及故障排除。3.協助廠務Local Scrubber ... CDO 863 還有dry pump 連接至scrubber pumping line 切閥?
搜尋:【local scrubber】最新徵才公司
https://www.104.com.tw
local scrubber 相關公司查詢結果. 共14 筆.
US20080236677A1
https://patents.google.com
Local scrubber systems are categorized into (1) thermal-wet type; (2) controlled decomposition/oxidation (CDO); (3) packing tower scrubbers; and ...
Local scrubber
https://baecltd.com.cn
Local scrubber ; Marathon 系列(燃烧-水洗式,适用于PFC/CVD/ETCH/DIFF) ; CDO 系列(电热- ; Vector系列(水洗式,适用于ETCH/DIFF).
新型半導體全氟化物廢氣電漿處理技術
https://www.tiri.narl.org.tw
18. K. Ri, ITRI Local Scrubber Symposium, Hsinchu, Taiwan, Sep. 24 (2002). 19. Y. C. Hong, H. S. Kim, and H. S. Uhm, Thin Solid Films, 435. (1-2), 329 (2003) ...