Scribe line:【光刻百科】划片槽Scribe line
【光刻百科】划片槽Scribe line
Impact of scribe line (kerf) defectivity on wafer yield
https://ieeexplore.ieee.org
Scribe line (also known as kerf or frame) is an area in a silicon wafer which is used to separate individual die at the end of wafer processing.
Scribe and Breaking Processing
https://www.mitsuboshidiamond.
In the scribing process, a crack is formed in the plate thickness direction by providing a cutting line (scribe line) on the plate surface. In the breaking ...
scribe line在線翻譯
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海詞詞典,最權威的學習詞典,為您提供scribe line的在線翻譯,scribe line是什麼意思,scribe line的真人發音,權威用法和精選例句等。
切割道結構及切割晶圓之方法
https://patentimages.storage.g
A scribe line structure is disclosed. The scribe line structure preferably includes a semiconductor substrate having a die region, a die seal ring region, ...
划片槽
https://baike.baidu.com
... scribe line)锯道(saw channel)或通道(street)。 中文名 划片槽 外文名 scribe line 作用 除了在分离芯片时起到隔离作用,另外也能够通过测试图形起到监控工艺的 ...
劃片槽
https://baike.baidu.hk
中文名. 劃片槽 · 外文名. scribe line · 作用. 除了在分離芯片時起到隔離作用,另外也能夠通過測試圖形起到監控工藝的作用 · 別名. 鋸道、通道 · 定義. 芯片之間留有80μm至 ...
微影製程切割道縮減之研究
https://ir.nctu.edu.tw
標題: 微影製程切割道縮減之研究. Study on Reduction of Scribe Line Width in Photolithography Process ; 作者: 黃翔塏 · Huang, Hsiang-Kai · 鄭泗東 · Cheng, Stone
解決方案
https://www.yuanyu.tw
Wafer Scribe line Observation Measurement. 晶圓切割預留寬度越大,晶圓上可放置的元件越少,成本相對上升,因此晶圓切割成為半導體產業製程中關鍵因素之一。OLS5000 ...