Critical Dimension：關鍵尺寸
關鍵尺寸
關鍵尺寸(CriticalDimension，簡稱CD)是指在集成電路光掩模製造及光刻工藝中為評估及控制工藝的圖形處理精度，特設計一種反映集成電路特徵線條寬度的專用線條圖形。。其他文章還包含有：「4.CD」、「Criticaldimension」、「CriticalDimension(CD)」、「CriticalDimensionStandards」、「InnovativeHighSignal」、「TheRayleighcriterionforresolution」、「Tocreateacriticaldimensionforoptimization」、「WhatdoesCriticalD...
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4. CD
https://www.hitachi-hightech.c
A Critical Dimension SEM (CD-SEM: Critical Dimension Scanning Electron Microscope) is a dedicated system for measuring the dimensions of the fine patterns ...
Critical dimension
https://en.wikipedia.org
In the renormalization group analysis of phase transitions in physics, a critical dimension is the dimensionality of space at which the character of the ...
Critical Dimension (CD)
https://www.muetec.com
Easy to use. Especially in the field of microelectronics some very special, sophisticated options have been developed to measure structures with a particular ...
Critical Dimension Standards
https://www.agarscientific.com
Economically priced, fully-featured Critical Dimension Standards for calibration over a wide measurement range. Available with two size ranges, ...
Innovative High Signal
https://www.ntu.edu.tw
The technique has a high signal-to-noise ratio, achieved by utilizing the high spatial coherence of a white light laser (supercontinuum laser) ...
The Rayleigh criterion for resolution
https://www.asml.com
Rayleigh criterion equation. In the Rayleigh criterion equation, CD is the critical dimension, or smallest possible feature size, and λ is the wavelength of ...
To create a critical dimension for optimization
https://help.autodesk.com
A critical dimension is defined by the distance between two specified locations, and is used to study part shrinkage and warpage. The aim of an optimization is ...
What does Critical Dimension mean?
https://www.compugraphics-phot
After a mask has been manufactured, a measurement is made of a feature on the mask to check that the exposure and processing of the mask are within the ...
高深寬比微結構之創新光學散射關鍵尺寸量測技術
https://www.tiri.narl.org.tw
In this study, we proposed a novel optical critical dimension (OCD) metrology system for non- ... 於量測高深寬比結構之關鍵尺寸(critical dimension, CD) 的主流方式 ...