Johnsen-Rahbek effect：雙極式靜電吸盤測試環境及吸附力之探討
雙極式靜電吸盤測試環境及吸附力之探討
由楊照彥著作·2003—...material)，半導體材料其產.生的靜電吸附壓力效應，稱為JohnsonRahbekeffect，其吸附力為：.(.)2.2.2.1.2.1.│.⎠.⎞.│.⎝.⎛.−.−.+.│.⎠.⎞.。其他文章還包含有：「AsimpletheoryoftheJohnsen」、「a)GeneralsetupofJohnsen」、「ComparisonofCoulombicandJohnsen」、「Howdoeselectrostaticfixationwork?」、「Johnsen–Rahbekeffect」、「PhysicalModelingandCharacteristicsofaJohnsen...」、「Predictionofr...
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A simple theory of the Johnsen
https://iopscience.iop.org
The Johnsen-Rahbek effect is briefly described and the existing theories of the phenomenon are discussed. A model is derived expressing the attractive force ...
a) General setup of Johnsen
https://www.researchgate.net
This work aims to demonstrate and explain a nearly century old electrostatic haptic effect in human fingertips, which has since gone unreported. This effect, ...
Comparison of Coulombic and Johnsen
https://euvlsymposium.lbl.gov
• The empirical factor α represents the effect of the nonuniform distribution of charge on the interface surfaces. • A relationship for α as a function of ...
How does electrostatic fixation work?
https://protec-carrier.com
In Johnsen-Rahbek chucks a current runs through the dielectric and leads to strong forces in direct contact with the substrate material. The ...
Johnsen–Rahbek effect
https://en.wikipedia.org
Physical Modeling and Characteristics of a Johnsen ...
https://www.scientific.net
Generally, a Johnsen-Rahbek (J-R) type electrostatic chuck (ESC) generates higher attractive force than a Coulomb type ESC. Attractive force in a J-R type ESC ...
Prediction of residual clamping force for Coulomb type and ...
https://journals.sagepub.com
A simple theory of the Johnsen-Rahbek effect. J Phys D: Appl Phys 1969; 2: 325–332. 312. Proc IMechE Part C: J Mechanical Engineering Science ...
Wafer dependence of Johnsen–Rahbek type electrostatic ...
https://www.researchgate.net
A Johnsen–Rahbek (J-R type) type electrostatic chuck (ESC) was found to be more sensitive to wafer conditions than classic ESC, ...