Attenuated phase shift mask：Attenuated phase shift masks

Attenuated phase shift masks

由AErdmann著作·2022·被引用22次—Wereviewpublishedresearchonattenuatedphaseshiftmasks(attPSM)forEUVwithspecialemphasisonmodelingandfundamentalunderstandingoftheimaging ...。其他文章還包含有：「AlternatingAperturePhaseShiftMasks」、「AttenuatedphaseshiftmasksusingMoSiasanopaquelayer」、「attenuatedphase」、「Phase」、「Phase」、「US5928813A」、「用於次25奈米極紫外光曝光機之新穎反射型衰減式相位移...

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Alternating Aperture Phase Shift Masks

https://www.photomask.com

We offer two distinct PSM technologies: Embedded Attenuated Phase Shift Masks (EAPSM) and Alternating Aperture Phase Shift Masks (AAPSM).

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Attenuated phase shift masks using MoSi as an opaque layer

https://ieeexplore.ieee.org

This paper will discuss the use of MoSi for attenuated PSMs. This approach has the advantage over the use of an SOG/Cr combination, that only a single dry etch ...

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attenuated phase

https://opg.optica.org

The attenuated phase-shift mask (Att. PSM) is a resolution enhancement technique, and its absorber is composed of a semi-transparent absorption ...

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Phase

https://en.wikipedia.org

Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography.

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Phase

https://spie.org

This type of PSM is generally called a “weak” shifter—it provides only a portion of the full resolution and depth of focus potential of alternating PSM. Its great advantage is the simplicity and low cost of replacing chrome on glass (COG) masks, the non-

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US5928813A

https://patents.google.com

An attenuated phase shift mask comprises a first layer having a thickness to provide a transmission in the range of about 3 to 10% formed on a transparent ...

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