Johnsen-Rahbek Chuck：Comparison of Coulombic and Johnsen
Comparison of Coulombic and Johnsen
Chuckscanbeeithermonopolarorbipolar.•Slab-typeorpin-typebasedonthesurfacecharacteristics.Apin-typechuckisproposedtominimizetheeffectsof ...。其他文章還包含有：「AnalysisofCoulombandJohnsen」、「DechuckOperationofCoulombTypeandJohnsen...」、「Hybridjohnsen」、「Johnsen」、「PredictionofresidualclampingforceforCoulombtypeand...」、「WaferdependenceofJohnsen–Rahbektypeelectrostatic...」、「產品資...
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Analysis of Coulomb and Johnsen
https://pubs.aip.org
The Coulomb chuck results in smaller gaps at lower pressure and the J-R chuck provides slightly smaller gaps at larger average pressures. Figure ...
Dechuck Operation of Coulomb Type and Johnsen ...
https://www.jstage.jst.go.jp
Comparative study on Coulomb type and Johnsen-Rahbek type of electrostatic chuck used for holding a silicon wafer in plasma processing is presented.
Hybrid johnsen
https://patents.google.com
A hybrid Johnsen-Rhabek chuck (100) that provides a combination of both Coulombic and Johnsen-Rahbek chucking mechanisms and contains a plurality of ...
Johnsen
https://patents.google.com
An electrostatic chuck includes dielectric layer having at least one region, an electrode associated with the at least one region, and an AC power source ...
Prediction of residual clamping force for Coulomb type and ...
https://journals.sagepub.com
Qin S and McTeer A. Wafer dependence of Johnsen–. Rahbek type electrostatic chuck for semiconductor pro- cesses. J Appl Phys 2007; 102: 064901.
Wafer dependence of Johnsen–Rahbek type electrostatic ...
https://www.researchgate.net
Johnsen-Rahbek type (JR type) electrostatic chuck (ESC) was found to be more sensitive to wafer conditions than classic ESC, including backside ...
產品資訊
https://www.calitech.com.tw
Electrostatic Chuck. 瑞耘科技設計與製造的陶瓷靜電 ... 當靜電吸盤使用的介電層材料為半導體材料時，稱為Johnsen-Rahbek 靜電吸盤(JR ESC)。 ... Johnsen-Rahbek 靜電吸盤(JR ...
靜電盤的吸附原理
https://www.creativetw.com.tw
以下介紹兩種靜電吸盤(Electrostatic chuck,E-CHUCK,ESC)常見的吸附原理。 ... Johnson-Rahbek ... 例如：AMAT Centura DT-HART、AMAT Producer、LAM Exelan385、Novellus、 ...