Johnsen-Rahbek Chuck：靜電盤的吸附原理

靜電盤的吸附原理

以下介紹兩種靜電吸盤(Electrostaticchuck,E-CHUCK,ESC)常見的吸附原理。...Johnson-Rahbek...例如：AMATCenturaDT-HART、AMATProducer、LAMExelan385、Novellus、 ...。其他文章還包含有：「AnalysisofCoulombandJohnsen」、「ComparisonofCoulombicandJohnsen」、「DechuckOperationofCoulombTypeandJohnsen...」、「Hybridjohnsen」、「Johnsen」、「PredictionofresidualclampingforceforCoulombtypeand...」、「Waferdepe...

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Analysis of Coulomb and Johnsen

https://pubs.aip.org

The Coulomb chuck results in smaller gaps at lower pressure and the J-R chuck provides slightly smaller gaps at larger average pressures. Figure ...

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Comparison of Coulombic and Johnsen

https://euvlsymposium.lbl.gov

Chucks can be either monopolar or bipolar. • Slab-type or pin-type based on the surface characteristics. A pin-type chuck is proposed to minimize the effects of ...

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Dechuck Operation of Coulomb Type and Johnsen ...

https://www.jstage.jst.go.jp

Comparative study on Coulomb type and Johnsen-Rahbek type of electrostatic chuck used for holding a silicon wafer in plasma processing is presented.

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Hybrid johnsen

https://patents.google.com

A hybrid Johnsen-Rhabek chuck (100) that provides a combination of both Coulombic and Johnsen-Rahbek chucking mechanisms and contains a plurality of ...

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Johnsen

https://patents.google.com

An electrostatic chuck includes dielectric layer having at least one region, an electrode associated with the at least one region, and an AC power source ...

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