Phase mask：相轉移光罩技術
相轉移光罩技術
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https://www.einstinc.com
Phase masks are the production tool used to write gratings in fibers and waveguides. Ibsen Phase masks incorporate unbeatable, interferometric (holographic) ...
Alternating Phase
https://spie.org
A phase-shift mask relies on the fact that light passing through a transparent media will undergo a phase change as a function of its optical thickness, the ...
Phase Mask
https://www.sciencedirect.com
When exposed to UV light, the phase mask is designed to cancel the 0th order diffraction, while maximizing the +1 and –1 orders of diffraction, creating an ...
Phase masks
https://ibsen.com
Phase masks are the production tool used to write gratings in fibers and waveguides. Ibsen Phase masks incorporate unbeatable, interferometric ( ...
Phase
https://en.wikipedia.org
Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography.
半導體器件用光掩模
https://www.photomask.co.jp
移相掩模（Phase-Shifting Mask：PSM）指透過控制光的相位及透過率，改善對晶圓曝光時的分辨率及焦點深度（DOF：Depth of Focus），是提高了復刻特性的光掩模。對於曝光 ...
用於次25 奈米極紫外光曝光機之新穎反射型衰減式相位移光罩
https://www.tiri.narl.org.tw
相位移光罩(phase-shifting-mask) 是目前一種極為重要的解析度增益技術，它將被應用於未來. 的極紫外光(EUV) 微影術中，以製作25 nm 以下的圖案。