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Atomic layer deposition: an overview

「Atomic layer deposition: an overview」文章包含有:「Atomiclayerdeposition」、「AtomicLayerDeposition」、「AtomicLayerDepositionandAtomicLayerEtching—An...」、「AtomicLayerDeposition」、「AtomicLayerDeposition」、「AtomicLayerDeposition」、「AtomicLayerDeposition」、「Review—OnAtomicLayerDeposition」

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Atomic layer deposition
Atomic layer deposition

https://en.wikipedia.org

Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical ...

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Atomic Layer Deposition
Atomic Layer Deposition

https://www.sciencedirect.com

Atomic layer deposition (ALD) is a chemical gas phase thin film deposition method based on sequential, self-saturating surface reactions [1–5]. Two or more ...

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Atomic Layer Deposition and Atomic Layer Etching—An ...
Atomic Layer Deposition and Atomic Layer Etching—An ...

https://link.springer.com

Atomic Layer Deposition and Atomic Layer Etching—An Overview of Selective Processes. Samiha Hossain,; Oktay H. Gokce &; N. M. Ravindra.

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Atomic Layer Deposition
Atomic Layer Deposition

https://www.seas.upenn.edu

Atomic layer deposition (ALD) has emerged as an ... ALD and TiO2 ALD on ferritin also demonstrated that ALD ... This overview has presented a brief introduction to ...

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Atomic Layer Deposition
Atomic Layer Deposition

https://pubs.acs.org

Amnon Rothman, Andreas Werbrouck, Stacey F. Bent. Enhanced Growth in Atomic Layer Deposition of Ruthenium Metal: The Role of Surface Diffusion ...

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Atomic Layer Deposition
Atomic Layer Deposition

https://pubs.acs.org

ALD is a gas phase method based on sequential, self-limiting surface reactions. ALD can deposit very conformal and ultrathin films on substrates ...

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Atomic Layer Deposition
Atomic Layer Deposition

https://www.researchgate.net

Atomic layer deposition (ALD) which has emerged as an important technique for depositing thin films for a variety of applications has been reported.

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Review—On Atomic Layer Deposition
Review—On Atomic Layer Deposition

https://iopscience.iop.org

Atomic layer deposition (ALD) has emerged as a versatile and robust deposition technique for developing high quality nanomaterials with an ...