Chucking force：介電材料之靜電吸盤吸附力探討
介電材料之靜電吸盤吸附力探討
chucking force在線翻譯
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海詞詞典,最權威的學習詞典,為您提供chucking force的在線翻譯,chucking force是什麼意思,chucking force的真人發音,權威用法和精選例句等。
ESC
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由此可以看出，想增加chucking force， 可以. 1. 增加电压. 2. 减小绝缘层厚度. 3. 使用介电常数高的绝缘材料. 4. 增加wafer size. 实际上wafer 的尺寸一般来说是固定的 ...
What is an Electrostatic Chuck (ESC)?
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An electrostatic chuck (ESC) is a specialized type of chuck that uses electrostatic force to chuck, hold down, and pick up objects (workpieces).
■ 什麼是靜電吸盤What is Electrostatic Chuck?
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靜電吸盤是於電極印加電壓使電極和對象物之間產生吸附力量的裝置。 圖片. □靜電吸盤的種類 (1) Coulomb-Force 庫倫力型靜電吸盤 ... □ 專利庫倫力型靜電吸盤Patent Coulumb ...
介電材料之靜電吸盤吸附力探討
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In this thesis, we discuss the effect of the chucking force on dielectric constants between different materials. ... We observed that one of the parameters of the ...
半導體專輯
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ESC CHUCKING FORCE的FAILURE: (1)ESC Module Chucking的能力,會隨. Chucking Force的下降而下降,如圖. 四所示,但其Chucking能力會隨著. Chucking Voltage Backside ...
除電參數分析及實驗設計於晶圓蝕刻後之偏移量改善研究
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A Study on Electrostatic Chucking Force of Dielectric Materials〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2007.02640; 彭俊益 ...